- Literature Review
o Comprehensive literature review of Bosch Process principles, critical parameters and their influence on full wafer uniformity.
o Overview of recent trends and research interests in Bosch-process technologies. - Experimental Work and Analysis
Characterization of the current state of selected production equipment in regards of Silicon etch rate uniformity, deposition uniformity, breakthrough-etch uniformity and overall Bosch-process etch rate uniformity.
o Characterization of Silicon etch rate uniformity, deposition uniformity, breakthrough-etch uniformity as a function of TSV depth.
o Probing the individual steps for robustness and optimization of uniformity in a Design of Experiment setting.
o Set-up of an optimized Bosch process sequence with improved full wafer uniformity
Who we are looking for
• Ongoing Master’s studies in Materials Science, Chemistry, Chemical Engineering, Physics, or related fields.
• Knowledge of Design of Experiment (DoE) is an advantage.
• Ability for swift and determined execution of experimental tasks since the work will be carried out on a critical production tool.
• Experience of data processing and data visualization.
• Experience of working in a cleanroom environment is highly appreciated.
• Independent, structured, and analytical working style.
• Ability to report experimental results clearly and unambiguously to different audiences with the respective technical details required.
• Proficiency in English (written and spoken).
We offer competitive salaries and additional benefits based on your performance, experience, and qualifications. Employment is in accordance with the collective agreement for the electrical and electronics industry, employment group E (https://www.feei.at/aktuelles/mindestloehne-und-gehaelter-eei/).
Please contact Marlies Nigitz for further information via marlies.nigitz@ams-osram.com or +43 (3136) 50032853.